Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus

摘要

A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, and a piezoelectric film formed above the buffer layer, wherein the buffer layer is formed of Pb ((Zr_1-xTi_x)_1-yNb_y)O₃ of a perovskite type, where x is in a range of 0<=x<=1, and y is in a range of 0.05<=y<=0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.