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发明名称
加热冷却模组
摘要
本发明系提供一种可将用以搭载半导体晶片且予以加热之加热器之发热量增大,且即使于短时间予以加热、冷却亦不会损坏之加热冷却模组。本发明之加热冷却模组系具有用以搭载被处理物且予以加热之陶瓷加热器;用以将该陶瓷加热器予以冷却之冷却机构;及于前述陶瓷加热器与冷却机构之间具有支撑体者,其特征在于:前述陶瓷加热器系为于内部具有1层以上发热体层之氮化铝加热器。于陶瓷加热器与支撑体之间具有中介层较佳。此外,于支撑体与冷却机构之间具有中介层较佳。
申请公布号
TW200741933
申请公布日期
2007.11.01
申请号
TW096108803
申请日期
2007.03.14
申请人
住友电气工业股份有限公司
发明人
夏原益宏;粟津知之;仲田博彦;三云晃
分类号
H01L21/66(2006.01)
主分类号
H01L21/66(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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