DIPPING DETECTING DEVICE OF SEMICONDUCTOR DEVICE, DIPPING EQUIPMENT OF SEMICONDUCTOR DEVICE COMPRISING THE SAME DETECTING DEVICE, AND METHOD OF DETECTING DIPPING STATE OF SEMICONDUCTOR DEVICE USING THE SAME DETECTING DEVICE

摘要

A dipping detecting device for semiconductor devices, a dipping equipment for the semiconductor devices, and a method of detecting a dipping state of the semiconductor devices are provided to detect a dipping defective of the semiconductor devices by detecting flow of an electric current during a dipping process. A conductive gripper(100) for a first electrode picks up a semiconductor device so that the semiconductor device is dipped in a dipping solution. A conductor(200) for a second electrode is formed on a side of the gripper, and is electrically isolated from the gripper. A power source(300) is connected to the gripper and the conductor to apply an electric power to the gripper and the conductor and detect flow of the power. The power source has a PLC(Programmable Logical Controller) module(320) or a DC or AC current supplying unit and an I/O(Input/Output) unit detecting flow of the current.