| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology to remove a treatment liquid and particles attaching to the side face of a piston and to keep the lubricity between the piston and a seal member in a syringe pump and a substrate treatment apparatus using the same. <P>SOLUTION: The syringe pump 8 of the substrate treatment apparatus supplies a washing liquid to the side face of the piston 82 in a backward chamber 85 formed in the rear end side of a cylinder 81. Therefore, a resist liquid and particles attaching to the side face of the piston 82 are washed away by the washing liquid and removed from the side face of the piston 82. Part of the washing liquid supplied to the backward chamber 85 attaches to the surface of a first seal member, a second seal member, and the piston 82 and functions as a lubricant. Therefore, the lubricity between the first seal member, the second seal member, and the piston 82 can be maintained. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
