| 摘要 |
A substrate inspection apparatus and method is provided to judge short circuit of a wiring pattern by using a phase or output of a voltage resulted from the wiring pattern. A first electrode(21) is disposed on plural wiring patterns in a non-contact manner to supply a signal to the wiring patterns. A second electrode(22) is disposed on one wiring pattern to be inspected in a non-contact manner to supply a signal to the wiring pattern. A first signal supply member(31) applies a first signal to the first electrode, and a second signal supply member(32) applies a second signal having a phase different from the first signal to the second electrode. A detection member(4) detects a voltage of the wiring pattern to be inspected. A judging member judges the wiring pattern based on the phase of the voltage.
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