METHODS FOR CONTROLLABLE DOPING OF ALUMINUM NITRIDE BULK CRYSTALS
摘要
Fabrication of doped and undoped stoichiometric polycrystalline AlN ceramics with high purity is accomplished by, for example, reacting Al pellets with nitrogen gas. Such polycrystalline AlN ceramics may be utilized in the fabrication of high purity AlN single crystals, which may be annealed to enhance a conductivity thereof.
申请公布号
WO2007123735(A1)
申请公布日期
2007.11.01
申请号
WO2007US07980
申请日期
2007.03.30
申请人
CRYSTAL IS, INC.;MORGAN, KENNETH, E.;SCHOWALTER, LEO, J.;SLACK, GLEN, A.
发明人
MORGAN, KENNETH, E.;SCHOWALTER, LEO, J.;SLACK, GLEN, A.
