Apparatus and method for plasma enhanced deposition of hard material layers

摘要

The device for plasma-supported separation of titanium-aluminum-nitride-hard material layers, comprises a vacuum chamber (2), a substrate carrier (5) for holding of substrates, an evaporation source arranged radially outside of the carrier, and a hollow cathode (9) for producing low volt plasma. The substrate carrier rotates around a central axis (7). The hollow cathode is arranged radially outside of the substrate. The evaporation source or the hollow cathode is arranged in the vacuum chamber and another device is arranged in the door of the vacuum chamber. The device for plasma-supported separation of titanium-aluminum-nitride-hard material layers, comprises a vacuum chamber (2), a substrate carrier (5) for holding of substrates, an evaporation source arranged radially outside of the carrier, and a hollow cathode (9) for producing low volt plasma. The substrate carrier rotates around a central axis (7). The hollow cathode is arranged radially outside of the substrate. The evaporation source or the hollow cathode is arranged in the vacuum chamber and another device is arranged in the door of the vacuum chamber. The anode is positioned in such a manner to the hollow cathode that the unloading of the hollow cathode-low volt plasma is formed parallelly to the substrate carrier. A line (10) is transposed in the plane right angular to the axis of 15-70[deg] between the hollow cathode and the anode that lies opposite to the line between the target of the evaporation source and the axis. Two to four sources of evaporation are present and the hollow cathode is intended between two adjacent sources of evaporation. The evaporation source is a vacuum arc evaporator or a cathodic atomization device. An independent claim is included for a method for plasma-supported separation of hard material layers.