,申请号JP19960301753-传众专利搜索

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发明名称
摘要
申请公布号	JP4002317(B2)	申请公布日期	2007.10.31
申请号	JP19960301753	申请日期	1996.11.13
申请人		发明人
分类号	C23C14/35;H01L21/203;H01L21/285	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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