NONDESTRUCTIVE INSPECTION DEVICE FOR DETECTING DEFECT OF MULTILAYER PIEZO-ACTUATOR

摘要

A non-destructive inspection device of a multilayer piezo-electric actuator is provided to detect defects of the multilayer piezo-electric actuator without damaging the multilayer piezo-electric actuator by employing an impact ball, which is dropped down to make a collision with the multilayer piezo-electric actuator. A non-destructive inspection device comprises an impact ball(110), a ball guide member(120) and a measurement member(130). The impact ball(110) transfers impact energy to a multilayer piezo-electric actuator(10) when the impact ball(110) collides with a surface of the multilayer piezo-electric actuator(10). The ball guide member(120) guides the movement of the impact ball(110) such that the impact ball(110) collides with the multilayer piezo-electric actuator(10). The measurement member(130) is electrically connected to an outer electrode of the multilayer piezo-electric actuator(10).