LITHOGRAPHIC PROJECTION APPARATUS, GAS PURGING METHOD, DEVICE MANUFACTURING METHOD AND PURGE GAS SUPPLY SYSTEM
摘要
<p>A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configured to pattern a projection beam according to a desired pattern. The apparatus has a substrate table configured to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate . The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface .</p>
申请公布号
WO2007120451(A1)
申请公布日期
2007.10.25
申请号
WO2007US07901
申请日期
2007.03.28
申请人
ENTEGRIS, INC.;PAREKH, BIPIN, S.;ZELLER, ROBERT, S.;HOLMES, RUSSELL, J.;SPIEGELMAN, JEFFREY, J.
发明人
PAREKH, BIPIN, S.;ZELLER, ROBERT, S.;HOLMES, RUSSELL, J.;SPIEGELMAN, JEFFREY, J.