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发明名称
NOVEL FLUOROPOLYMER HAVING ACID-REACTIVE GROUP AND CHEMICAL AMPLIFICATION TYPE PHOTORESIST COMPOSITION CONTAINING THE SAME
摘要
申请公布号
EP1275666(A4)
申请公布日期
2007.10.24
申请号
EP20010917810
申请日期
2001.04.03
申请人
DAIKIN INDUSTRIES, LTD.
发明人
ARAKI, TAKAYUKI;KOH, MEITEN;TANAKA, YOSHITO;ISHIKAWA, TAKUJI;AOYAMA, HIROKAZU;SHIMIZU, TETSUO
分类号
G03F7/004;G03F7/038;G03F7/039;G03F7/075;(IPC1-7):C08F20/22;C08F16/24;C08F14/18;C08F30/08;C08F32/00
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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