发明名称 SEMICONDUCTOR DEVICE AND METHOD OF INCREASING RESISTANCE VALUE OF ELECTRIC FUSE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device having an electric fuse configuration which can be cut by supplying a current without damaging a peripheral part. <P>SOLUTION: An electric fuse 10 is electrically connected between an electronic circuit and a redundancy circuit serving as a spare of the electronic circuit, and can be cut by supplying a current from the outside after the circuits are sealed with resin. The electric fuse 10 is provided in a fine layer and formed of main wiring 1 and a barrier film 3. Coefficients of the linear expansion of the main wiring 1 and the barrier film 3 are larger than those of insulating layers 2, 4 and 5 formed around the main wiring 1 and the barrier film 3. Further, melting points of the main wiring 1 and the barrier film 3 are lower than those of the insulating layers 2, 4 and 5. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007273940(A) 申请公布日期 2007.10.18
申请号 JP20060256226 申请日期 2006.09.21
申请人 RENESAS TECHNOLOGY CORP 发明人 IWAMOTO TAKESHI;KONO KAZUFUMI;ARAKAWA MASASHI;YONEZU TOSHIAKI;OBAYASHI SHIGEKI
分类号 H01L21/82;H01L21/3205;H01L23/52 主分类号 H01L21/82
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