| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of reducing size and weight of a galvanomirror while making the entire apparatus compact. <P>SOLUTION: A laser beam marking device performs printing of characters or the like by irradiating a workpiece W to be printed with the laser beams L emitted from a laser beam source 1 through an objective lens 6 while performing the two-dimensional scanning by first and second galvanomirrors 3, 4. The first and second galvanomirrors 3, 4 are arranged between a condensing lens 2 for expanding the beam diameter D1 of the laser beams L from the laser beam source 1 and a collimator lens 5 which condenses the laser beams L with its beam diameter expanded by the condensing lens 2 into nearly parallel beams. The first and second galvanomirrors 3, 4 are arranged in the vicinity of a focal position S of the condensing lens 2 at which the beam diameter of the laser beams 1 passing through the condensing lens 2 is smaller than the beam diameter D1 of the laser beams L emitted from the laser beam source 1. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
