| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device in which a fragile substrate can be aligned while suppressing cracking by relaxing a pressing force applied to the substrate. SOLUTION: In the alignment device for aligning a substrate 4 with a predetermined position while holding the opposing side faces of the substrate 4 mounted on a base mount 5 by a first press means 1 and a second press means 2, at least one of the press means 3 is composed of a member 6 having an elastic modulus lower than that of the substrate 4. COPYRIGHT: (C)2008,JPO&INPIT |
