| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus and a heat treatment method efficiently and productively carrying out heat treatment of a substrate with a surface comprised of metal or an alloy to form an oxide layer. SOLUTION: The heat treatment apparatus is for carrying out heat treatment of the substrate 3 with the surface comprised of metal or an alloy. It is provided with a gas burner 20 introduced with at least fuel gas and ejecting combustion gas from a tip, fuel gas introducing means 21, 22 introducing the fuel gas into the gas burner, a combustion chamber 1 having an inlet for introducing combustion flame discharged from the gas burner, a treatment chamber 2 provided in communication with the combustion chamber 1 via a communication part 13 and carrying out heat treatment of the substrate 3 placed therein, and a treatment atmosphere forming means 17 for forming an atmosphere with uniform combustion gas in the treatment chamber 2 by introducing the combustion gas ejected from the gas burner 20 from the communication part 13. COPYRIGHT: (C)2008,JPO&INPIT |
