Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
摘要
<p>A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.</p>
申请公布号
DE60217283(T2)
申请公布日期
2007.10.18
申请号
DE2002617283T
申请日期
2002.11.27
申请人
ASML NETHERLANDS B.V.
发明人
JACOBS, HERNES;VOSTERS, PIET;HOL, SVEN ANTOLN JOHAN;VAN DER SCHOOT, HARMEN KLASS;VAN DIESEN, ROBERT JOHANNES PETRUS;CALLAN, DAVID WILLIAM