发明名称 THIN-FILM TRANSISTOR ARRAY FOR LCD AND THE METHOD FOR MANUFACTURING THE SAME
摘要 The present invention provides a thin-film transistor array, of which the units provide with a storage capacitor disposed in the thin-film transistor array and a protective layer of transparent conductive material covering the source/drain metal of the thin-film transistor array. The present invention also provides a method for manufacturing the thin-film transistor array, the method comprising three photomask processes, wherein the gate metal over the pixel electrode defined along with the gate is removed due to etch selectivity ratio; the active region of the thin-film transistor is defined by gray-tone mask; and the passivation film is defined through back-side exposure that is masked by the pattern of the gate metal region.
申请公布号 US2007243673(A1) 申请公布日期 2007.10.18
申请号 US20070624108 申请日期 2007.01.17
申请人 WINTEK CORPORATION 发明人 KANG HEN TA
分类号 H01L21/84;H01L21/00 主分类号 H01L21/84
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