APPARATUS FOR INSPECTING LASER BEAM PARALLELISM OR THE LIKE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting laser beam parallelism or the like for stably and easily performing highly accurate inspection when inspecting parallelism of the laser beam.

SOLUTION: The apparatus S for inspecting the laser beam parallelism is equipped with: a laser diode LD which emits the laser beam through a collimator lens 2; an optical system 10 which generates astigmatism to the laser beam passing through the collimator lens 2; a light receiving means 15 which receives the laser beam passing through the optical system 10; and a determining means 30 which determines the parallelism of the laser beam based on an image form of the laser beam received by the light receiving means 15.

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