A METHOD FOR GROWING A THIN FILM IN GASEOUS PHASE, AND APPARATUS FOR GROWING A THIN FILM IN GASEOUS PHASE ADAPTED TO CONDUCTING THE ABOVE METHOD,申请号KR20010031776-传众专利搜索

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发明名称	A METHOD FOR GROWING A THIN FILM IN GASEOUS PHASE, AND APPARATUS FOR GROWING A THIN FILM IN GASEOUS PHASE ADAPTED TO CONDUCTING THE ABOVE METHOD
摘要
申请公布号	KR100765866(B1)	申请公布日期	2007.10.11
申请号	KR20010031776	申请日期	2001.06.07
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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