SENSOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sensor device with reduced height utilizing a member provided to a mass body and a support part for regulating displacement of the mass body without providing a separate stopper.

SOLUTION: A sensing part Ds includes the support part 11 formed of the semiconductor substrate and the mass body 12. The support part 11 and the mass body 12 are connected by a flexure part 13 having flexibility in the thickness direction of the semiconductor substrate. The support part 11 is mounted on a mounting substrate 21 by bumps 25 to be leg parts. A lower surface of the support part 11 and an inner bottom surface of the mounting substrate 21 hold a prescribed distance by the bumps 25. A stopper piece 15 inserted between the support part 11 and the mounting substrate 21 is provided on a lower surface of the mass body 12. A range of displacement of the mass body 12 is regulated between a position where the stopper piece 15 abuts against a locking part that is the lower surface of the support part 11 and a position where the stopper piece 15 abuts against the mounting substrate 21.

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