| 摘要 |
PROBLEM TO BE SOLVED: To achieve a sampling system and a sampling method capable of superposition of the results of tests without deviation. SOLUTION: This invention is obtained by improving the test system for sampling the test data from a test result memory in which the test results data of an IC test device for testing a plurality of test objects are stored. This system characteristically comprises: the random number generation means for generating the random number using at least one among the lot number of the test object, the number of wafer number, and the coordinate representing the position on the wafer; and the data collection means for selecting and collecting the test result data from the test result memory by the random number by the random data generation means. COPYRIGHT: (C)2008,JPO&INPIT
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