| 摘要 |
A bubble removing apparatus is provided to remove bubbles generated from a predetermined process or to reduce the generation of bubbles by decreasing uniformly the speed of a fluid using a mesh net. A bubble removing apparatus includes a storing bath, a collecting unit, one or more mesh nets and supply unit. The storing bath(100) is used for storing chemicals or a deionized water. The collecting unit is used for flowing the chemicals or deionized water into the storing bath. The mesh net(200) is installed at an end portion of the collecting unit. The mesh net is composed of a plurality of meshes. The supply unit is used for supplying the chemicals and deionized water into process equipment.
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