A system for manufacturing a flat display device is provided to extend a life of a filter by flowing a working fluid to the filter when removing floating matters by a floating matter filtering unit without allowing a working fluid including the floating matters to be directly flowed into the filter, and to reduce cost by shortening the replacement period of the filter. A system for manufacturing a flat display device includes a working chamber(300) which removes a necessary part during working layers formed in a flat display panel by using a working fluid, a floating matter filtering unit(100) which receives the working fluid discharged from the working chamber and filters the floating matters of the working layers included in the working fluid, a filter(500) which receives the working fluid discharged from the floating matter filtering unit and filters the components of the working layers included in the working fluid, and a strip liquid storing unit(700) which stores a strip liquid of which the photo resist components are filtered by the filter.
申请公布号
KR20070099310(A)
申请公布日期
2007.10.09
申请号
KR20060030597
申请日期
2006.04.04
申请人
DONGJIN SEMICHEM CO., LTD.
发明人
PARK, HEE JIN;KIM, SEONG BAE;YOON, SUK IL;JEONG, JONG HYUN;HUH, SOON BEOM;SHIN, SUNG GUN;JUNG, SE HWAN;HUH, HYUN;KIM, BYUNG UK