| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a sheet-like probe capable of realizing a successful state of electric connection with a wafer, even in the case that a pitch of test electrodes on the wafer being an object to be tested is very narrow. SOLUTION: The method for manufacturing the sheet-like probe having an electrode structure being disposed so as to penetrate between both sides of an insulating sheet, comprises at least: the step of forming a complex by bringing a plurality of electrode structure forming parts to project from at least one surface of a metallic foil in a manufacturing operation of the electrode structure; and the step of preparing the insulating sheet, punching a plurality of through-holes in the insulating sheet so as to correspond to respective electrode structure forming parts of the complex, and inserting the electrode structure forming parts into the through-holes respectively. COPYRIGHT: (C)2008,JPO&INPIT
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