| 摘要 |
PROBLEM TO BE SOLVED: To provide a dispersion state digitizing system capable of appropriately determining a dispersion state of MgO powder on a substrate. SOLUTION: The dispersion state digitizing device 660 of this dispersion state digitizing system 600 acquires an actual image of a front substrate 3 imaged by a CCD camera 620 and converts the actual image to a binarized image corresponding to a utilization threshold value. A standard deviation valueσobtained from an area value of a part representing MgO powder 342A is calculated for the whole of each binarized image. A value obtained by dividing the total area of the part representing the MgO powder 342A in each binarized image by the area of the binarized image is calculated as a ratioη. Based on the standard deviation valueσand the ratioη, a dispersion value B corresponding to each utilization threshold value is calculated. By integrating the calculated dispersion values B, a dispersion state numerical value L representing the dispersion state of the MgO powder 342A is calculated. COPYRIGHT: (C)2008,JPO&INPIT
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