摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated piezoelectric element high in adhesion between terminal electrodes and a laminated body while securing conduction between internal-electrode layers and the terminal electrodes, even when using Cu as a conductive material for an internal electrode. <P>SOLUTION: A manufacturing method is used for manufacturing the laminated piezoelectric element provided with the laminated body, which has a plurality of piezoelectric-body layers and the internal-electrode layers including Cu and respectively formed between a plurality of the piezoelectric-body layers; and the terminal electrodes joined to the laminated body so as to electrically connect the internal-electrode layers with an external power supply, while being in contact with each end part of the internal-electrode layers. At first, after obtaining the laminated body by baking in a state in which piezoelectric-body layer precursors and internal-electrode layer precursors are laminated, terminal-electrode precursors are applied in a prescribed region of the laminated body. Next, the terminal electrodes are formed by baking the terminal-electrode precursors onto the laminated body in a state in which the ends of the internal-electrode layers are oxidized. Then, the laminated body having the terminal electrodes is subjected to heat treatment in a reduction atmosphere. <P>COPYRIGHT: (C)2008,JPO&INPIT |