| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing magnetic recording media, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. SOLUTION: A filling material 36 is deposited over a workpiece 10 including a recording layer 32 formed over a substrate 12 in a predetermined concavo-convex pattern of which convex portions are recording elements 32A and a detection material 44 formed over the recording layer 32, and concave portions 34 are filled. The surface of the workpiece 10 is irradiated with process gas to remove the filling material 36 and the detection material 44 over the top surface of the recording elements 32A to flatten the surface. An element contained in the detection material 44 removed from and flying off the workpiece 10 is detected, and irradiation with the process gas is stopped according to the detection result of the element contained in the detection material 44. The detection material 44 uses a material containing an element selected from Al, Y, Zr, Nb, Rh, Ag, Tb, Ta, Au, Bi, Ti, In and W. COPYRIGHT: (C)2008,JPO&INPIT
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