发明名称 PROJECTION OPTICAL SYSTEM
摘要 A projection optical system comprises a plurality of lenses disposed along an optical axis of the projection optical system; wherein the plurality of lenses is dividable into four non-overlapping groups of lenses, such that a total refractive power of each group of lenses is one of a negative refractive power and a positive refractive power; and wherein a refractive power of each lens of the fourth group of lenses is equal to or greater than 0. A lens of the third group of lenses which is disposed directly adjacent to a lens of the fourth group of lenses may have a concave surface facing towards the second object.
申请公布号 KR20070097083(A) 申请公布日期 2007.10.02
申请号 KR20077017303 申请日期 2007.07.27
申请人 CARL ZEISS SMT AG 发明人 DODOC AURELIAN;ULRICH WILHELM
分类号 G02B13/14;G03F7/20 主分类号 G02B13/14
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