| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the delay in temperature rise of a lower portion in a furnace main body by changing a jig for baking used for raising to a jig for baking of high strength, and reducing heat capacity of a raised part. <P>SOLUTION: This jig for baking 7 as a baking jig for raising a baking position of a baked object W, has properties of high heat conduction efficiency and high mechanical strength, and is formed by a structure of the shape capable of placing the baked object W, composed of silicon carbide of high purity, sintered under normal pressure, and preferably composed of a hollow structure. <P>COPYRIGHT: (C)2007,JPO&INPIT |
