| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a downsized angular velocity sensor. <P>SOLUTION: This angular velocity sensor is equipped with a substrate 1 having a recessed part 2, an IC 3 mounted in the recessed part 2 of the substrate 1, and first and second vibration elements 4 and 5 mounted on the substrate 1 and electrically connected to the IC 3. The IC 3 is facedown mounted in the recessed part 2 of the substrate 1 while the vibration elements 4 and 5 are partly positioned on the IC 3. <P>COPYRIGHT: (C)2007,JPO&INPIT |
