| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing spindle with a rotating part having a reduced axial length without lowering both the rotating accuracy of the rotating part and the performance of an object fixing means. SOLUTION: In the static pressure gas bearing spindle 1, gas is distributed between a ventilation hole 29 and the object fixing means via a rotation side ventilation passage 32 provided in a thrust plate 4 and a fixation side ventilation passage 30 provided in the fixing part to change gas pressure in the object fixing means. The rotation side ventilation passage 32 which has one end connected to the motor side surface of the thrust plate 4 is provided in the thrust plate 4, so as not to require for providing a conventional ventilating sleeve. Thus, the rotating part 2 has a reduced axial length, compared with that of a conventional static pressure gas bearing spindle, without reducing the axial length of a static pressure gas journal bearing. COPYRIGHT: (C)2007,JPO&INPIT
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