发明名称 METHOD AND APPARATUS FOR PROCESSING MULTIPHOTON CURABLE PHOTOREACTIVE COMPOSITIONS
摘要 A method including providing a substrate having thereon a layer including a multiphoton polymerizable composition, applying a light beam to at least one region of the layer, wherein the light beam cures or initiates cure of the multiphoton curable photoreactive composition; and processing a portion of the light beam reflected off the substrate to obtain a location signal of an interface between the layer and the substrate at each region.
申请公布号 WO2007073482(A3) 申请公布日期 2007.09.27
申请号 WO2006US48498 申请日期 2006.12.20
申请人 3M INNOVATIVE PROPERTIES COMPANY;SYKORA, CRAIG R.,;REED, STEVEN C.,;WETZELS, SERGE,;LEATHERDALE, CATHERINE A.,;ATKINSON, MATTHEW R.C., 发明人 SYKORA, CRAIG R.,;REED, STEVEN C.,;WETZELS, SERGE,;LEATHERDALE, CATHERINE A.,;ATKINSON, MATTHEW R.C.,
分类号 H01L21/027;G02B6/00;G03C1/73 主分类号 H01L21/027
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