发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a stabilized direct-current power supply used for an electron microscope of which the output is stabilized in a short time by the compensation of resistance value fluctuation caused by the temperature drift of a direct-current load. SOLUTION: As an example, an output part resistor of the stabilized direct-current power supply, and a temperature-sensing resistor with an equivalent temperature coefficient are provided, and it is so structured that a temperature drift generated at the output part resistor is offset by a temperature drift generated at the temperature-sensing resistor. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007250221(A) 申请公布日期 2007.09.27
申请号 JP20060068473 申请日期 2006.03.14
申请人 HITACHI HIGH-TECHNOLOGIES CORP;HITACHI HIGH-TECH SCIENCE SYSTEMS CORP 发明人 NEMOTO MASAHIRO
分类号 H01J37/248 主分类号 H01J37/248
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