| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat conductivity measuring method which enables the simple measurement of the heat conductivity of a pure gas or a mixed gas regardless of the temperature of the gas, and a heat conductivity measuring instrument. SOLUTION: The microheater provided on the thin-walled region (e.g., microbridge) formed to a sensor chip and positioned in an atmosphere gas is used and the heat conductivity of the atmosphere gas is calculated according to the radiation coefficient of the microheater calculated from the power applied to the microheater and the heater temperature at the time of application of power. The sensor chip is supported in the atmosphere gas through a heat insulating body and the resistance value of the auxiliary heater provided to the sensor chip is controlled constant while the temperature of the atmosphere gas in the vicinity of the periphery of the sensor chip is made constant. The heat conductivity of the atmosphere gas is calculated from the drive power of the microheater at this time. COPYRIGHT: (C)2007,JPO&INPIT
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