| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive probe assembly having long service life, and to provide a probe card that uses the same. SOLUTION: The probe assembly 100 to be mounted on the probe card has a probe holder 200 for holding a plurality of probes Q, at predetermined positions and a leaf spring mechanism 300 for attaching the probe holer 200. The leaf spring mechanism 300 includes a thin leaf spring cover 360, to be connected to a probe card substrate 410 and a leaf spring 330, and has a probe-retaining substrate 310 for mounting the probe holder 200. The substrate 310 can move with respect to the leaf spring cover 360 via the thin leaf spring 330, when it is brought into contact with a bump electrode. COPYRIGHT: (C)2007,JPO&INPIT
|
