HEATER UNIT FOR MANUFACTURING AND INSPECTING SEMICONDUCTOR AND FLAT DISPLAY PANEL, AND DEVICE EQUIPPED WITH IT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing/inspecting device of a semiconductor and a flat display panel, which increases a temperature raising speed and a temperature lowering speed while keeping and improving a soaking property, and of achieving high throughput by mounting a heater unit, in relation to a heater unit having a mounting base and a back plate. SOLUTION: Heat transfer is expanded in a direction parallel to a processing surface 11a of the mounting base 11 by inserting a high-heat-conduction sheet 14 between the mounting base 11 and the back plate 12 of the heater unit 10, and an excellent soaking property is secured. The heat capacity of the heater unit 10 is reduced by reducing the thickness of the mounting base 11, and a cooling block 3 is brought into contact with or separated from the back plate 12 of the heater unit 10 to increase the temperature raising speed and the temperature lowering speed. COPYRIGHT: (C)2007,JPO&INPIT