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发明名称
摘要
申请公布号
JP3984014(B2)
申请公布日期
2007.09.26
申请号
JP20010293781
申请日期
2001.09.26
申请人
发明人
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/84;H01L27/12
主分类号
H01L21/205
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代理人
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