| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table inspection method capable of properly inspecting the suction holding performance of a chuck table. SOLUTION: The method of inspecting the chuck table composed of a chuck table body 2 equipped with a holding area on an upper surface and a suction passage 52 communicating with the holding area, and a suction holding member 3 arranged in the holding area and having permeability; comprises a sucking force producing step communicating the suction passage 52 of the chuck table 2 with a sucking means 51 to produce sucking force in the holding area; a flow rate resistance calculating step measuring the flaw rate of air flowing in the suction passage 52 and the pressure of the suction passage, and obtaining a circulation resistance value by dividing the suction passage pressure by the air flow rate; and a determining step determining the chuck table 2 as a non-defective product when the circulation resistance value calculated by the circulation resistance calculating step is within a predetermined permissible area, and determining the chuck table 2 as a defective product when the circulation resistance value is out of the predetermined permissible range. COPYRIGHT: (C)2007,JPO&INPIT |
