| 摘要 |
PROBLEM TO BE SOLVED: To reliably detect a misregistration of a substrate held by a transport arm. SOLUTION: The misregistration inspection mechanism comprises a plurality of substrate detection sensors 62A, 62B for detecting a presence of a substrate G. A transport arm 52 can be configured to move to a first holding position Pa3 which holds the substrate G to a first inspecting position Pg3 when the transport arm 52 holds the substrate G regularly, and a second holding position Pa4 which holds the substrate G to a second inspecting position Pg4 when the transport arm 52 holds the substrate G regularly. The plurality of substrate detection sensors 62A, 62B respectively detect a portion which differs from each other in an edge of the substrate G disposed in the first inspecting position Pg3, and are disposed so as not to detect the substrate G disposed in the second inspecting position Pg4. COPYRIGHT: (C)2007,JPO&INPIT |
