发明名称 METHOD FOR FORMING BUMP ON ELECTRODE PAD WITH USE OF DOUBLE-LAYERED FILM
摘要 A process for forming bumps on electrode pads performs at least the following steps (a) to (d) for a wiring board including a substrate and a plurality of electrode pads: (a) a step of forming a laminated two-layer film on the wiring board and forming a pattern of apertures at positions corresponding to the electrode pads, the laminated two-layer film including a lower layer containing an alkali-soluble radiation-nonsensitive resin composition and an upper layer containing a negative radiation-sensitive resin composition; (b) a step of filling a low-melting metal in the aperture pattern; (c) a step of reflowing the low-melting metal by pressing or heating to form bumps; and (d) a step of peeling and removing the laminated two-layer film from the board. The laminated film including two layers with different properties permits high resolution and easy peeling. <IMAGE>
申请公布号 KR100756151(B1) 申请公布日期 2007.09.05
申请号 KR20057002880 申请日期 2005.02.21
申请人 发明人
分类号 G03F7/11;H05K3/40;G03F7/40;G03F7/42;H01L21/60;H01L23/12;H05K3/28;H05K3/34 主分类号 G03F7/11
代理机构 代理人
主权项
地址