| 发明名称 |
A spiral inductor formed in a semiconductor substrate and a method for forming the inductor |
| 摘要 |
<p>An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in one embodiment a planar spiral. A region of the substrate below the inductor are removed to lower the inductive Q factor.</p> |
| 申请公布号 |
EP1830402(A2) |
申请公布日期 |
2007.09.05 |
| 申请号 |
EP20070075479 |
申请日期 |
2004.08.20 |
| 申请人 |
AGERE SYSTEMS, INC. |
发明人 |
HARRIS, EDWARD B.;DOWNEY, STEPHEN W |
| 分类号 |
H01L21/768;H01L23/522;H01F17/00;H01F41/04;H01L21/02;H01L21/822;H01L27/04;H01L27/08;H01L49/02 |
主分类号 |
H01L21/768 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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