摘要 |
A method for testing a contact region of a semiconductor module having a circuit arrangement is disclosed. In one embodiment, the semiconductor module is heated by an electrical heating current flow and the electrical and/or thermal quality of a plurality of contacts provided in the contact region is determined in the process from a temperature-dependent measurement quantity. The heating current flow is formed by a plurality of heating current pulses. The application of the heating current pulses leads to different phases of the measurement quantity. The different phases are assigned to the different contacts and evaluated correspondingly for determining the electrical and/or thermal quality of the contacts.
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