发明名称 |
Fourier Transform spectrometer apparatus using multi-element MEMS |
摘要 |
A Fourier Transform (FT) spectrometer apparatus uses multi-element MEMS (Micro-Electro-Mechanical-Systems) or D-MEMS (Diffractive Micro-Electro-Mechanical-Systems) devices. A polychromatic light source is first diffracted or refracted by a dispersive component such as a grating or prism. The dispersed beam is intersected by a multi-element MEMS apparatus. The MEMS apparatus encodes each spectral component thereof with different time varying modulation through corresponding MEMS element. The light radiation is then spectrally recombined as a single beam. The beam is further split into to a reference beam and a probe beam. The probe light is directed to a sample and then the transmitted or reflected light is collected. Both the reference beam and probe beam are detected by a photo-detector. The detected time varying signal is analyzed by Fourier transformation to resolve the spectral components of the sample under measurement.
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申请公布号 |
US7265830(B2) |
申请公布日期 |
2007.09.04 |
申请号 |
US20050064956 |
申请日期 |
2005.02.25 |
申请人 |
BWT PROPERTY, INC. |
发明人 |
WANG SEAN XIAOLU |
分类号 |
G01J3/28;G01J3/10;G01J3/433;G01J3/453 |
主分类号 |
G01J3/28 |
代理机构 |
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