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发明名称
Vorrichtung zur Verkapselung von mikroelektromechanischen integrierten Systemen und Verfahren zu deren Herstellung
摘要
申请公布号
DE60307769(T2)
申请公布日期
2007.08.23
申请号
DE2003607769T
申请日期
2003.12.12
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
DELAPIERRE, GILLES
分类号
B81B7/00;B81C1/00
主分类号
B81B7/00
代理机构
代理人
主权项
地址
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