| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor mounting structure securing a high sealability, cleanliness (low out-gas) property and corrosion resistance by mounting a flow sensor for measuring microflow of fluid, such as gas on a flow channel body formed by metal members. <P>SOLUTION: This structure comprises the sensor 2 which accommodates a detecting part 10 formed on a base plate 8 in a sensor chip 5 and is formed by joining chips 6 with a conductive channel on which the conductive channel 12 is formed for the fluid to the detecting part, a pushing member 19 on which conductive channels 19a, 19b communicating with the conductive channel 12 are formed and is joined to the chip with the conductive channel, a conductive channel body 15 comprising the sensor on which conductive channels 15a, 15b connected to the conductive channels of the pushing member are formed, and to which the pushing member is fixed, and a metal seal 18 placed between the conductive channel body 15 and the pushing member 19 and at a connection part of the conductive channel and which is pushed by the pushing member for sealing the connection part. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
