| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a composition for polishing having excellent polishing performance and long shelf life. <P>SOLUTION: The composition for polishing contains (a) colloidal silica of which a part of surface is covered with aluminum atoms, and (b) a compound having at least one kind of isothiazoline-3-on skeleton. The compound having isothiazoline-3-on skeleton is 2-methyl-4-isothiazoline-3-on. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
