发明名称 |
Kristallziehvorrichtung für Metallfluoride |
摘要 |
A single crystal pulling apparatus for a metal fluoride comprising a crucible provided in a chamber and filling a molten solution of a single crystal manufacturing material, a melting heater provided to surround the crucible, a vertically movable single crystal pulling bar including a seed crystal on a tip and coming in contact with the molten solution of the single crystal manufacturing material filled in the crucible, a heat insulating wall provided in the chamber to surround at least a peripheral side portion of a single crystal pulling region in an upper part of the crucible, a ceiling board for closing an opening portion of an upper end in an upper part of the heat insulating wall, and a single crystal pulling chamber surrounded by the heat insulating wall and the ceiling board, wherein the ceiling board is provided with at least an inserting hole for inserting the single crystal pulling bar, and a coefficient of thermal conductivity in a direction of a thickness of the ceiling board is 1000 to 50000 W/m<2>. K. <IMAGE> |
申请公布号 |
DE60307578(T2) |
申请公布日期 |
2007.08.23 |
申请号 |
DE2003607578T |
申请日期 |
2003.11.19 |
申请人 |
TOKUYAMA CORP. |
发明人 |
NAWATA, TERUHIKO;MIYAZAKI, HIDETAKA;YANAGI, HIROYUKI;NITTA, SHINICHI;ITO, HARUMASA;YAMAGA, ISAO |
分类号 |
C30B15/14;C30B29/12;C30B15/00 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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