AUTOMATED PROBE CARD PLANARIZATION AND ALIGNMENT METHODS AND TOOLS
摘要
A method and apparatus for performing automated alignment of probes of a probe card is provided. The desired horizontal location for a probe is compared with the actual horizontal position for the probe to determine a horizontal correction distance and a horizontal correction direction to correct a horizontal alignment for the probe. A first tool automatically corrects the horizontal alignment for the probe based on the horizontal correction distance and the horizontal correction direction. Upon determining that an actual vertical position of the probe is closer to the probe card than a desired vertical position, a second tool automatically changes the actual vertical position of the probe to the desired vertical position. Upon determining that the actual vertical position of the probe is farther from the probe card than the desired vertical position, a third tool automatically changes the actual vertical position of the probe to the desired vertical position.
申请公布号
WO2007092592(A2)
申请公布日期
2007.08.16
申请号
WO2007US03474
申请日期
2007.02.08
申请人
SV PROBE PTE LTD.;TUNABOYLU, BAHADIR;FRICK, GUY;MALANTONIO, EDWARD L.;CLAUGERG, HORST;MCGLORY, JOHN
发明人
TUNABOYLU, BAHADIR;FRICK, GUY;MALANTONIO, EDWARD L.;CLAUGERG, HORST;MCGLORY, JOHN