MICROMIRROR APPARATUS AND MIRROR ARRAY

摘要

PROBLEM TO BE SOLVED: To reduce the mutual interference between mirror apparatuses when a plurality of micro mirror apparatuses are arranged adjucently. SOLUTION: The micromirror apparatus 1 is provided with: a plate-shaped slider 4; a driving means (micromotor 2 and a gear 3) which moves the slider 4 in one dimensional direction; and a plurality of mirrors 5 to 7 disposed on the slider 4 along the one dimensional direction. The driving means moves the slider 4 and arrange a mirror selected from the mirrors 5 to 7 on a predetermined position on the optical axis of incident light. The angles of the reflection face of the mirrors 5 to 7 are different from each other with respect to the optical axis of the incident light. COPYRIGHT: (C)2007,JPO&INPIT