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发明名称
Umweltsperrschicht für Substrate auf der Basis von Silizium
摘要
申请公布号
DE602004002721(T2)
申请公布日期
2007.08.16
申请号
DE20046002721T
申请日期
2004.05.21
申请人
UNITED TECHNOLOGIES CORPORATION
发明人
SUN, ELLEN Y.;LINDSEY, GARY D.;HOLOWCZAK, JOHN E.;BALDWIN, NEIL R.;EATON, HARRY E.
分类号
B32B18/00;C04B41/52;C04B41/89;C23C4/10;C23C28/00;C23C28/04;F01D5/28
主分类号
B32B18/00
代理机构
代理人
主权项
地址
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